The price of a lithograph with topological standards of 350 nm from the manufacturer ZNTZ has become known. With an additional guarantee, it exceeds 500 million rubles. Experts agree that this is a good price to pay for technological sovereignty.
As CNews has learned, the cost of the first Russian Progress STP-350 lithograph at the end of 2025 was approximately 392 million rubles. without VAT.
This lithograph with a wavelength of 354.7 nm is produced by the Zelenograd Nanotechnology Center (ZNTC). The photo is from Sergei Sobyanin's official TG channel.
Its price is reflected in the commercial offer made by one of the Russian microelectronics manufacturing companies.
The cost of the system includes delivery to the customer's location, installation of equipment and staff training on the buyer's premises.
The production and delivery time of the equipment is 18 months from the date of payment of the advance payment. The amount of the advance is 50% of the cost of the lithograph, it follows from the document.
The equipment's productivity will be 63 plates with a diameter of 150 mm per hour or 43 plates with a diameter of 200 mm.
According to the same commercial offer, the price of extended warranty service for the lithograph will be 58 million rubles, and the cost of an additional five years of warranty will be 111 million rubles.
Thus, the price of a lithograph with an extended warranty period exceeds half a billion and amounts to 561 million rubles. without VAT.
The extended warranty for the lithograph lasts for two years. It includes "comprehensive system reliability coverage," including repairs, remote diagnostics, etc.
The additional warranty is valid for five years for all systems except for consumables and photo templates. The warranty period is 12 months for the main equipment and for spare parts, as well as consumables.
In addition, additional modules can be purchased: active vibration protection for 40 million rubles and a set of 24 photo templates for 12 million rubles (both prices without VAT).
In case of cancellation of the order, ZNTC does not refund the advance payment, it follows from the document. And if the customer refuses the equipment after it is manufactured and ready for shipment, then 100% of the contract value will be charged from him.
ZNTC intends to put its lithograph in Element as well.
The answer is "ZNTC"
"Currently, we have concluded contracts for deferred delivery," the ZNTC representative notes. — We do not disclose the data of the contract." According to him, the cost of the equipment itself is determined by the cost of materials, components and work. The company emphasizes that the cost of the equipment "is competitive in relation to similar foreign equipment."
The issue of the cost of maintenance has not yet been worked out, ZNTC emphasizes.
"The cost is very attractive, significantly, tens of percent lower than that of foreign versions of 350—nanometer equipment," said Alexey Boyko, an independent expert and author of the RUSmicro Telegram channel.
Two CNews interlocutors in the microelectronics market agree with him. "This price is comparable to its foreign counterparts," says one of them.
But there is another opinion.
"From the point of view of the global market economy, this is an extremely high cost for the proposed technical characteristics," says Alexander Timoshenko, head of Trinity Technologies. — From the point of view of the logic of import substitution in the face of severe technological sanctions, it is probably a reasonable and necessary price to pay for creating your own basic competence in the field of photolithography, even at the level of 350 nm. It's a price to pay for technological sovereignty."
The development was carried out jointly with the Belarusian company Planar within the framework of tenders of the Ministry of Industry and Trade, won by ZNTC in 2021. Work on the lithograph was completed in the spring of 2025. Work is currently underway on the next generation of equipment with a resolution of 130 nm.
The lithograph has a working field with an area of 22 x 22 mm and is capable of processing plates with a diameter of 200 mm.
The operating wavelength of the installation is 365 nm. Its service life is at least five years, and its weight is 3,500 kg.
As CNews wrote in September 2025, the cost of the ZNTC lithograph with a wavelength of 130 nm will be $6 million. The manufacturer promises a plate processing speed of 100 to 140 plates per hour.
For example, the same installation of the Dutch ASML, which occupies 45% of the market, costs $15 million. And it processes 180 plates per hour. Nikon equipment (25% of the market) costs $12 million and is capable of processing 150 plates per hour. Canon's equipment, which has 20% of the market, costs $10 million. And processes 140 plates per hour. The same installation from SMEE will cost $8 million and is capable of processing 120 plates per hour.
