Residents of the Technopolis Moscow special economic zone and scientists of the National Research University "MIET" are conducting research to create an installation that will allow printing chips with a size of 28 nanometers and below, which are in demand in modern microelectronics.
This was announced by the head of the Department of Investment and Industrial Policy, which is part of the Complex of Economic Policy and Property and Land Relations of the capital, Vladislav Ovchinsky.
"Residents of the SEZ of Moscow are participating in a project to create technology and develop a lithograph installation - a unique equipment for the production of microcircuits. Scientific work on the project is carried out on the basis of NIU MIET with the participation of the Zelenograd Nanotechnology Center, a resident of the capital technopolis. The production capacities of the microelectronics cluster of the capital SEZ will be used to manufacture the samples necessary for the project," Vladislav Ovchinsky said.
The installation will be able to be used for the production of chips of topological sizes from 28 nanometers and below on the basis of Russian synchrotrons and plasma radiation sources. MIET scientists in cooperation with residents of the SEZ of Moscow are currently studying the possibility of implementing the technology.
According to Sergey Gavrilov, Vice-Rector for Scientific Work at MIET, if this work is completed successfully, it will be followed by a development project to create a lithographic installation.
"Residents of the SEZ of Moscow make a significant contribution to the domestic innovation and microelectronic industry. Thus, the resident of the Zelenograd Nanotechnology Center has already invested more than 300 million rubles in the project. The next step in this direction is participation in the creation of a unique lithograph for printing chips. This work in cooperation with MIET University will strengthen competencies and be an important step in technological development for microelectronics in Russia," said Gennady Degtev, General Director of Technopolis Moscow SEZ.