The Government has approved a scoring system for evaluating equipment for the production of microelectronics, which is necessary to recognize such products as Russian.
Document No. 601 dated May 26, 2026 amends Government Resolution No. 719 "On Confirmation of the Production of Russian Industrial products", supplementing Section IX with eight new items: from installations for epitaxial growth of structures to equipment for polishing plates. The document was published on the official legal information portal at the end of May 2026.
For the first time, plans to introduce a point system for chip production equipment became known in October 2025, when Fatima Dzodzikova, Deputy Director of the Machine Tool Department of the Ministry of Industry and Trade, announced the relevant criteria at the Microelectronics forum.
The resolution introduces a scoring system for eight categories of equipment: installations for epitaxial growth of semiconductor structures, lithographs, ion implantation installations, equipment for the production of semiconductor ingots, for heat treatment of wafers (deposition, diffusion, etc.), for the formation of thin-film structures, laser equipment for processing and polishing semiconductor wafers.
For example, manufacturers of lithographs will be given 30 points each for Russian radiation sources, cathode nodes, lenses, optical paths, electron-optical systems, vacuum pumps, alignment modules and high—voltage power sources, 20 points each for using domestic plate movement mechanisms, controllers and interface devices, 10 points each for electron detectors, loading mechanisms, UPS, electrical equipment and frame.
For equipment for epitaxy (growing semiconductor structures), 30 points will be awarded for the use of a domestic reactor or vacuum chamber, precursor sources, monitoring devices and vacuum pumps, 20 points each for the plate movement mechanism, crucibles made of special materials, a vacuum gauge, power supplies and a central controller, 10 points each for fittings, a mechanism loading, gas system, electrical equipment, chiller, UPS and bed.
Manufacturers of plate polishing and grinding units will receive 30 points each for the spindle motor, 20 points each for cast iron products, a worktable or turntable, ball screw gears, a vacuum system or a force distribution mechanism, an installation control unit, a controller and interface devices. 10 points each for the bed, cabinet protection, gearbox, rolling guides, hydraulic system, coolant supply system, pneumatic system, power supply unit, aspiration system and electrical engineering.
The use of Russian software is separately encouraged: 30 points are awarded for top—level and lower-level software from the unified registry, and another 20 points are awarded for working out the basic technological process in Russia.
At the same time, for all types of equipment, the manufacturer's rights to design documentation, a service center in the EAEU, as well as the assembly, installation and debugging of software in Russia, as well as the commissioning and testing of equipment remain mandatory conditions — these requirements do not give points, but without them the equipment cannot be recognized as Russian.
Minimum score thresholds are set for each type of equipment, with gradual tightening. For epitaxial equipment, the minimum threshold will increase from 130 to 250 points, for lithographic equipment — from 80 to 170 points, for ion implantation installations — from 180 to 210 points (the requirements will enter into force only from 2029). For wafer heat treatment equipment, the threshold will increase from 80 to 170 points, for thin-film structure forming installations — from 90 to 250 points, for laser equipment — from 70 to 160 points, and for polishing and grinding machines — from 90 to 210 points.
The first stage of the requirements will take effect from September 2026, the second from 2029, and the most stringent standards will enter into force from 2032.
